SE-1000 Spectroscopic Ellipsometer - Tabletop Manual System
Description:
SE-1000 provides modularity and high measurement performance in a compact table top footprint. This cost-efficient tool includes manual goniometer and manual sample positioning suitable for R&D laboratories. It performs non-contact and non-destructive optical measurements on substrates, single layer and multi-layer samples to obtain individual thin film thickness and optical properties. SE-1000 includes Semilab’s new smart electronics with interchangeable components, and operates with the new generation operating and analysis software (SAM / SEA). The system can be controlled from a PC or laptop through LAN network, or by a new touch panel.
Features:
- Broad Spectral Range
- High Precision Optics
- Non-Destructive Testing
- Modular & Scalable Design
- Microspot Capability
- Advanced Software
Measurement modes:
- Spectroscopic Ellipsometry with rotating compensator
- Generalized Ellipsometry for anisotropic samples
- Mueller matrix 11 coefficients
- Jones matrix
- Porosimetry: Measurements of pore size distribution and porosity in thin films
- In situ measurement mode for real time control during deposition or etch process
Application
