InSEM® HT Nanoindenter
InSEM® HT Nanoindenter KLA INSTRUMENTS Johor Bahru (JB), Malaysia, Selangor, Kuala Lumpur (KL), Penang Supplier, Suppliers, Supply, Supplies | Atomic Solutions Sdn Bhd

In-situ SEM Nanoindentor


The InSEM® HT nanomechanical test system has been specifically designed for mechanical properties testing at high temperature under vacuum on small volumes of materials, without sacrificing accuracy or cost. The InSEM HT measures hardness, modulus and stiffness at high temperatures by independently heating both the tip and sample in a vacuum environment. It also has the ability to view real-time deformation, adding to the understanding of material performance at elevated temperatures.




  • Tip-calibration system

  • XYZ motion system for sample targeting

  • Inquest high speed controller electronics

  • Vacuum-compatible sample mounting system

  • Come with Inview control and data review software

  • Sample heating up to 800°C with 10mm sample-size

  • SEM video capture for synchronized SEM images with data

  • Enclosed system facilitates measurement of light-sensitive or environment-sensitive samples


  • High temperature testing

  • Hardness and modulus measurements (Oliver-Pharr)

  • Continuous stiffness measurement

  • High speed material property maps

  • Creep measurement

  • Strain rate sensitivity


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